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Chemical Vapour Deposition: Precursors, Processes and Applications by Anthony C.

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Item specifics

Condition
Brand New: A new, unread, unused book in perfect condition with no missing or damaged pages. See all condition definitionsopens in a new window or tab
ISBN-13
9780854044658
Book Title
Chemical Vapour Deposition
ISBN
9780854044658
Publication Year
2008
Type
Textbook
Format
Hardcover
Language
English
Publication Name
Chemical Vapour Deposition : Precursors, Processes and Applications
Item Height
1.5in
Author
Michael L. Hitchman
Item Length
9.7in
Publisher
Royal Society of Real Chemistry, T.H.E.
Item Width
7.4in
Item Weight
47.7 Oz
Number of Pages
600 Pages

About this product

Product Information

A comprehensive overview on the key aspects of chemical vapour deposition processes written by practising CVD technologists who are also leading international experts.

Product Identifiers

Publisher
Royal Society of Real Chemistry, T.H.E.
ISBN-10
0854044655
ISBN-13
9780854044658
eBay Product ID (ePID)
71148816

Product Key Features

Author
Michael L. Hitchman
Publication Name
Chemical Vapour Deposition : Precursors, Processes and Applications
Format
Hardcover
Language
English
Publication Year
2008
Type
Textbook
Number of Pages
600 Pages

Dimensions

Item Length
9.7in
Item Height
1.5in
Item Width
7.4in
Item Weight
47.7 Oz

Additional Product Features

Lc Classification Number
Ts695
Reviews
"...Timely and welcome...comprehensive, well-presented and refreshingly readable."...this book will be very useful to a broad readership, including chemists, engineers and students."
Table of Content
An overview of CVD processes CVD reactors and delivery systems Modeling CVD processes ALD processes Basic chemistry of CVD precursors MOCVD of III-V semiconductors MOCVD of II-VI semiconductors CVD of metals CVD of oxides used in microelectronics CVD of metal nitride films CVD of functional coatings on glass CVD of optical coatings CVD of hard protective coatings Photon-assisted MOCVD processes Plasma-assisted MOCVD processes Commercial aspects of CVD
Copyright Date
2009
Topic
General, Chemistry / Industrial & Technical, Chemistry / General
Intended Audience
Scholarly & Professional
Illustrated
Yes
Genre
Technology & Engineering, Science

Item description from the seller

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