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Flash Lamp Annealing: From Basics to Applications by Lars Rebohle (English) Pape
US $155.14
ApproximatelyPHP 8,670.43
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eBay item number:364702716209
Item specifics
- Condition
- Brand New: A new, unread, unused book in perfect condition with no missing or damaged pages. See all condition definitionsopens in a new window or tab
- ISBN-13
- 9783030233013
- Type
- NA
- Publication Name
- NA
- ISBN
- 9783030233013
- Book Title
- Flash Lamp Annealing : from Basics to Applications
- Book Series
- Springer Series in Materials Science Ser.
- Publisher
- Springer International Publishing A&G
- Item Length
- 9.3 in
- Publication Year
- 2020
- Format
- Trade Paperback
- Language
- English
- Illustrator
- Yes
- Genre
- Technology & Engineering, Science
- Topic
- Physics / Condensed Matter, Electronics / Semiconductors, Materials Science / Electronic Materials
- Item Weight
- 16.7 Oz
- Item Width
- 6.1 in
- Number of Pages
- Xviii, 288 Pages
About this product
Product Identifiers
Publisher
Springer International Publishing A&G
ISBN-10
3030233014
ISBN-13
9783030233013
eBay Product ID (ePID)
24050413943
Product Key Features
Book Title
Flash Lamp Annealing : from Basics to Applications
Number of Pages
Xviii, 288 Pages
Language
English
Publication Year
2020
Topic
Physics / Condensed Matter, Electronics / Semiconductors, Materials Science / Electronic Materials
Illustrator
Yes
Genre
Technology & Engineering, Science
Book Series
Springer Series in Materials Science Ser.
Format
Trade Paperback
Dimensions
Item Weight
16.7 Oz
Item Length
9.3 in
Item Width
6.1 in
Additional Product Features
Series Volume Number
288
Number of Volumes
1 vol.
Table Of Content
Introduction.- Technological background.- Basic components.- Flash lamps.- Process management and process control.- FLA assisted deposition.- Temperature.- Thermal budget.- Temperature measurements.- Temperature simulations.- FLA for semiconductors.- Defect engineering.- Doping.- Crystallization.- Semiconductor nanostructures.- Beyond semiconductors.- Transparent conducting oxides.- Metallic films.- High-k materials and dielectrics.- Flexible substrates.- Outlook.
Synopsis
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.
LC Classification Number
QC610.9-611.8
Item description from the seller
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